Automated semiconductor substrate polishing and cleaning
AssigneeGlobalWafers Co., Ltd.
InventorsShinBae Park, SangJun Kim
Life of this patent
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Abstract
A semiconductor wafer processing system for processing a set of semiconductor wafers includes a controller, a transfer robot controlled by the controller, a wet bath for containing a cleaning solution, and a cassette positioned in the wet bath for holding the set of wafers. The transfer robot transfers the wafer from a transfer location to the cassette and the controller controls the transfer robot during the transfer.
Claims20
A semiconductor wafer processing system for processing a set of semiconductor wafers, the system comprising:
- a controller;
- a transfer robot controlled by the controller;
- a wet bath for containing a cleaning solution;
- and
- a cassette positioned in the wet bath for holding the set of wafers, wherein the transfer robot transfers the wafer from a transfer location to the cassette and the controller controls the transfer robot during the transfer.
A wafer processing system for processing a wafer, the system comprising:
- a transfer robot;
- a wet bath including a wall and defining a container for retaining a cleaning solution;
- a cassette positioned within the wet bath for holding the wafer, wherein the transfer robot transfers the wafer from a transfer location to the cassette;
- an automated guided vehicle (AGV) including a robot arm for positioning the cassette in the wet bath and removing the cassette from the wet bath;
- and
- a cassette holder attached to the wall for maintaining a position of the cassette within the wet bath, wherein the AGV positions the cassette within the cassette holder and removes the cassette from the cassette holder.
A method of processing a wafer, the method comprising:
- positioning a cassette within a wet bath with an automated guided vehicle (AGV);
- transferring the wafer from a transfer location to the cassette with a transfer robot;
- and
- removing the cassette and the wafer from the wet bath with the AGV.
Dependencies are inferred from the claim text.