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US 2022/0028708 A1Published application
Support unit and substrate treating apparatus including the same
AssigneeSemes Co., Ltd.
InventorsKangseop YUN, Youngil LEE, Jungbong CHOI
Life of this patent
Estimating the term…
Abstract
A support unit for supporting a substrate includes a heating member and a reflector, and the reflector includes a curved surface that reflects thermal energy generated by the heating member toward an edge region of the substrate.
Claims20
A support unit for supporting a substrate, the support unit comprising:
- a heating member;
- and
- a reflector,
- wherein the reflector includes a curved surface configured to reflect thermal energy generated by the heating member toward an edge region of the substrate.
1 more element
An apparatus for treating a substrate, the apparatus comprising:
- a support unit configured to support the substrate;
- and
- a liquid dispensing unit configured to dispense a treatment liquid onto the substrate supported on the support unit,
- wherein the support unit includes:
- a chuck configured to support the substrate;
- a heating member configured to emit light to heat the substrate supported on the chuck;
- and
- a reflector disposed under the heating member, and
- wherein the reflector includes a curved surface configured to reflect the light toward an edge region of the substrate supported on the chuck.
6 more elements
An apparatus for treating a substrate, the apparatus comprising:
- a support unit configured to support the substrate;
- and
- a liquid dispensing unit configured to dispense a treatment liquid onto the substrate supported on the support unit,
- wherein the support unit includes:
- a chuck configured to support the substrate;
- a lamp provided inside the chuck and configured to emit light to heat the substrate supported on the chuck;
- and
- a reflector configured to reflect the light toward an edge region of the substrate,
- wherein the reflector includes a curved surface configured to form part of a virtual ellipse having a first focal point and a second focal point, when viewed from the front of the support unit,
- wherein the first focal point is in agreement with the center of the lamp when viewed from the front, and
- wherein the second focal point, when viewed from the front, overlaps the edge region of the substrate supported on the chuck.
8 more elements
Dependencies are inferred from the claim text.