Material processing apparatus and operating method thereof

An operating method of a material processing apparatus, comprising:

• providing a material processing apparatus, wherein the material processing apparatus comprises:
• a processing chamber, having an internal space;
• an external pressure source, connected to the processing chamber for positive pressure action on the internal space;
• a vacuum generator, connected to the processing chamber for negative pressure action on the internal space;
• a temperature regulator, arranged in the processing chamber and configured to adjust a temperature in the internal space;
• and
• a controller, configured to control the external pressure source to increase a pressure in the processing chamber from a normal pressure to a first predetermined pressure, and configured to control the vacuum generator to, after the pressure in the processing chamber rises to the first predetermined pressure, reduce the pressure in the processing chamber to a second predetermined pressure less than the normal pressure;
• placing an electronic product in the processing chamber;
• operating the controller to increase the pressure in the processing chamber from the normal pressure to the first predetermined pressure;
• and
• after the pressure in the processing chamber rises to the first predetermined pressure, operating the controller to reduce the pressure in the processing chamber to the second predetermined pressure.