Method and system for adjustable coating using magnetron sputtering systems
AssigneelNTERPANE ENTWICKLUNGS - UND BERATUNGSGESELLSCHAFT MBH
InventorDominik WAGNER
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Abstract
A method and a system for adjustable coating on a substrate using a magnetron sputtering apparatus are provided. The method comprises the steps of providing a magnetron assembly which comprises a plurality of magnets attached to a plurality of yokes and a plurality of actuating mechanisms (208), each operatively coupled to at least one of the plurality of yokes. The method further comprises automatically determining individual positions of each of the plurality of yokes of the magnetron assembly on the basis of at least one parameter, and adjusting individually positions of each of the plurality of yokes of the magnetron assembly in accordance with the automatically determined individual positions.
Claims16
1-15. (canceled)
A method for coating on a substrate using a magnetron sputtering apparatus, the method comprising:
- providing a magnetron assembly comprising a plurality of magnets attached to a plurality of yokes, and a plurality of actuating mechanisms, each operatively coupled to at least one of the plurality of yokes;
- automatically determining individual positions of each of the plurality of yokes of the magnetron assembly on the basis of at least one parameter;
- and
- adjusting individually positions of each of the plurality of yokes of the magnetron assembly in accordance with the automatically determined individual positions.
A magnetron sputtering apparatus for coating on substrates, the sputtering apparatus comprising:
- a magnetron assembly comprising a plurality of magnets attached to a plurality of yokes, a plurality of actuating mechanisms, each operatively coupled to at least one of the plurality of yokes, and a controller in operative communication with the sputtering apparatus and comprising a processor, which is configured to automatically determine individual positions of each of the plurality of yokes on the basis of at least one parameter;
- and
- wherein positions of each of the plurality of yokes of the magnetron assembly are adjusted individually by the actuating mechanisms in accordance with the individual positions automatically determined by the processor.
Dependencies are inferred from the claim text.