Rotary magnetron sputtering with individually adjustable magnetic field
AssigneelNTERPANE ENTWICKLUNGS - UND BERATUNGSGESELLSCHAFT MBH
InventorsAlexander POLLE, Dominik WAGNER
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Abstract
A magnetron assembly for magnetron sputtering with rotary cathode systems is provided. The magnetron assembly comprises a plurality of magnets attached to a plurality of yokes and a plurality of driving modules, each comprising an actuating mechanism operatively coupled to at least one of the plurality of yokes. The plurality of driving modules are adapted for adjusting the position of the plurality of yokes individually.
Claims17
1-16. (canceled)
A magnetron assembly for magnetron sputtering comprising:
- a plurality of magnets attached to a plurality of yokes;
- and
- a plurality of driving modules, the driving modules each comprising an actuating mechanism operatively coupled to at least one of the plurality of yokes;
- and
- wherein the plurality of driving modules are adapted for adjusting the position of the plurality of yokes individually.
A method for displacing individual yokes in a magnetron assembly for magnetron sputtering, the method comprising:
- providing a plurality of magnets attached to a plurality of yokes;
- providing a plurality of driving modules, each comprising an actuating mechanism;
- operatively coupling each actuating mechanism to at least one of the plurality of yokes;
- and
- adjusting the positions of the plurality of yokes individually by the driving modules.
Dependencies are inferred from the claim text.