Device and method for plasma treatment of containers

A device for plasma treatment of containers (5), comprising:

• a process gas generator (100) for generating a process gas mixture;
• and
• at least one coating station (3) which comprises at least one plasma chamber (17) with a treatment station (40),
• wherein in the plasma chamber at least one container (5) with a container interior (5.1) can be inserted and positioned at the treatment station (40),
• wherein the respective plasma chamber (17) is configured to be at least partially evacuable in order to draw the process gas provided by the process gas generator (100) through the container (5), which provides its interior with an internal coating by plasma treatment,
• wherein a gas lance (36) is movable into the interior of the plasma chamber (17),
• wherein pressure measuring devices (79, 96-98) are provided at predetermined locations of the device in order to ensure process stability, and
• wherein the pressure measuring devices (79, 96-98) comprise gas-type-dependent pressure transducers (86) at least at a part of the predetermined locations of the device.

A method for plasma treatment of containers (5) in a plasma treatment device, comprising the following method steps:

• generating a process gas mixture by a process gas generator (100);
• inserting and positioning a container (5) with a container interior (5.1) at a treatment station (40) of at least one plasma chamber (17) of a coating station (3);
• at least partially evacuating the respective plasma chamber (17) to draw the process gas provided by the process gas generator (100) through the container (5), thereby providing its interior with an internal coating by plasma treatment;
• and
• measuring a pressure at predetermined locations of the plasma treatment device with pressure measuring devices (79, 96-98) to ensure process stability,
• wherein the pressure is measured at predetermined locations of the plasma treatment device with pressure measuring devices (79, 96-98) comprising gas-type-dependent pressure transducers (86).