Member for semiconductor manufacturing device
AssigneeToto Ltd.
InventorYasutaka NITTA
Life of this patent
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Abstract
A member for a semiconductor manufacturing device includes an alumite base material including a concavity and a first layer formed on the alumite base material and including an yttrium compound. The first layer includes an outer surface, a first region on a side of the outer surface, and a second region provided in the concavity and located between the first region and the alumite base material. The concavity includes first and second portions respectively provided with the first and second regions. A width of the second portion is narrower than a width of the first portion in a cross section along a stacking direction and a boundary of the first layer in the concavity and the alumite base material being curved convex toward the outer surface of the first layer.
Claims5
A member for a semiconductor manufacturing device, comprising:
- an alumite base material including a concavity defined therein;
- and
- a first layer formed on the alumite base material and including an yttrium compound,
- the first layer including
- an outer surface,
- a first region on a side of the outer surface, and
- a second region provided in the concavity and located between the first region and the alumite base material,
- the concavity including a first portion provided with the first region and a second portion provided with the second region,
- a width of the second portion being narrower than a width of the first portion in a cross section along a stacking direction, and
- a boundary of the first layer in the concavity and the alumite base material being curved convex toward the outer surface of the first layer in the cross section.
Dependencies are inferred from the claim text.