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US 2022/0028654 A1Published application
Charged Particle Beam Apparatus and Setting Assisting Method
AssigneeJEOL Ltd.
InventorKazutaka Watakabe
Life of this patent
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Abstract
A UI image includes a reference image, which includes a background image and a schematic image. The background image corresponds to a cross section of a specimen having a multilayer structure. The schematic image includes a figure indicating an electron penetration depth, a figure indicating a characteristic X-ray generation depth, and a figure indicating a back-scattered electron generation depth. These figures are displayed in an overlapping manner or in parallel to each other.
Claims9
A charged particle beam apparatus comprising:
- a calculator configured to calculate a depth of a physical phenomenon which extends in a depth direction in a specimen having a multilayer structure, according to a condition of illumination of a charged particle beam onto the specimen;
- a generator configured to generate a reference image having a background image indicating the multilayer structure and a schematic image indicating the depth of the physical phenomenon, based on the depth of the physical phenomenon;
- and
- a display configured to display the reference image when an actual illumination condition of the charged particle beam is set.
1 more element
A method of assisting setting, the method comprising:
- calculating a depth of a physical phenomenon which extends in a depth direction in a specimen having a multilayer structure, according to a condition of illumination of a charged particle beam onto the specimen;
- generating a reference image having a background image indicating the multilayer structure and a schematic image indicating the depth of the physical phenomenon, based on the depth of the physical phenomenon;
- and
- displaying the reference image.
1 more element
Dependencies are inferred from the claim text.