Charged Particle Beam Apparatus and Setting Assisting Method
AssigneeJEOL Ltd.
InventorsKazutaka Watakabe, Hirofumi Kuwahara, Takenori Miyahara, Takahide Sakata, Felix Timischl
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Abstract
A reference image is generated based on an illumination condition and element information of a specimen. The reference image includes a figure indicating a characteristic X-ray generation range, a numerical value indicating a characteristic X-ray generation depth, or the like. The reference image changes with a change of an accelerating voltage, a tilt angle, or an element forming the specimen. The reference image may include a figure indicating a landing electron scattering range, a figure indicating a back-scattered electron generation range, or the like.
Claims11
A charged particle beam apparatus comprising:
- a measurement unit configured to illuminate a charged particle beam onto a specimen, and that detects a signal emitted from the specimen;
- a reference image generator configured to generate a reference image including a figure simulating a signal generation range in the specimen and a numerical value indicating a size of the signal generation range, based on an illumination condition and specimen information for the generation of the reference image;
- and
- a display configured to display a graphical user interface image including the reference image when an actual illumination condition of the charged particle beam is set.
A method of assisting setting, the method comprising:
- generating a reference image including a figure simulating a range of a physical phenomenon in a specimen onto which an electron beam is illuminated and a numerical value indicating a size of the range of the physical phenomenon, based on an illumination condition and specimen information for the generation of the reference image;
- and
- displaying the reference image when a user sets an actual illumination condition of the electron beam.
Dependencies are inferred from the claim text.