Charged Particle Beam Apparatus and Setting Assisting Method
AssigneeJEOL Ltd.
InventorsKazutaka Watakabe, Hirofumi Kuwahara, Takenori Miyahara, Takahide Sakata, Felix Timischl
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Abstract
An average mass, an average density, and an average atomic number for a plurality of elements which form a specimen are calculated. A characteristic X-ray generation depth is calculated based on the average values and a minimum excitation energy of an element of interest. When an illumination condition is set, a reference image including a figure indicating a characteristic X-ray generation range, a numerical value indicating the characteristic X-ray generation depth, or the like, is displayed.
Claims9
A charged particle beam apparatus comprising:
- a receiver configured to receive a plurality of pieces of element information for a plurality of elements which form a specimen, and a plurality of concentrations of the plurality of elements;
- a reference image generator configured to generate a reference image including a figure simulating a range of a physical phenomenon in the specimen and a numerical value indicating a size of the range of the physical phenomenon, based on an illumination condition of a charged particle beam, the plurality of pieces of element information for the plurality of elements, and the plurality of concentrations;
- and
- a display configured to display the reference image when an actual illumination condition of the charged particle beam is set.
A method of assisting setting, the method comprising:
- receiving a plurality of pieces of element information for a plurality of elements which form a specimen, and a plurality of concentrations of the plurality of elements;
- generating a reference image including a figure simulating a range of a physical phenomenon in the specimen and a numerical value indicating a size of the range of the physical phenomenon, based on an illumination condition of a charged particle beam, the plurality of pieces of element information for the plurality of elements, and the plurality of concentrations;
- and
- displaying the reference image when an actual illumination condition of the charged particle beam is set.
Dependencies are inferred from the claim text.