Charged particle beam apparatus
AssigneeHitachi High-Tech Corporation
InventorsTakafumi Miwa, Seiichiro Kanno, Go Miya
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Abstract
Provided is a charged particle beam apparatus capable of analyzing foreign matters generated when a sample is transported or observed. The charged particle beam apparatus includes a sample stage on which a measurement sample is provided, a charged particle beam source that irradiates the measurement sample with a charged particle beam, and a detector that detects charged particles emitted by irradiation with the charged particle beam, and includes a foreign matter observation sample held on the sample stage together with the measurement sample and a foreign matter observation unit that causes a foreign matter to be observed on the foreign matter observation sample.
Claims11
A charged particle beam apparatus including:
- a sample stage on which a measurement sample is held;
- a charged particle beam source configured to irradiate the measurement sample with a charged particle beam;
- and
- a detector configured to detect a charged particle emitted by irradiation with the charged particle beam,
- the charged particle beam apparatus comprising:
- a foreign matter observation sample held on the sample stage together with the measurement sample;
- and
- a foreign matter observation unit configured to observe a foreign matter on the foreign matter observation sample.
Dependencies are inferred from the claim text.