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US 2022/0028649 A1Published application
Charged Particle Beam Apparatus and Setting Assisting Method
AssigneeJEOL Ltd.
InventorKazutaka Watakabe
Life of this patent
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Abstract
A GUI (graphical user interface) image includes an input portion and a reference image. The reference image includes a plan diagram and numerical value information. The plan diagram includes a figure indicating an electron penetration range, a figure indicating a characteristic X-ray generation range, and a figure indicating a back-scattered electron generation range. The numerical value information includes numerical values indicating sizes of these ranges.
Claims8
A charged particle beam apparatus comprising:
- a calculator configured to calculate a size of a range of a physical phenomenon which occurs in a specimen when a charged particle beam is illuminated onto the specimen, based on specimen information and an illumination condition;
- a generator configured to generate a reference image having a plan diagram indicating the range of the physical phenomenon and numerical value information indicating the size of the range of the physical phenomenon;
- and
- a display configured to display the reference image when an actual illumination condition of the charged particle beam is set.
1 more element
A method of assisting setting, the method comprising:
- calculating a size of a range of a physical phenomenon which occurs in a specimen when a charged particle beam is illuminated onto the specimen;
- generating a reference image having a plan diagram indicating the range of the physical phenomenon and numerical value information indicating the size of the range of the physical phenomenon;
- and
- displaying the reference image.
1 more element
Dependencies are inferred from the claim text.