Detection method and apparatus, electronic device, and storage medium

Abstract

Embodiments of the present disclosure provide a detection method and apparatus, an electronic device, and a storage medium. In one form, the detection method includes: providing a layout graphic and a scan graphic; superimposing and comparing the layout graphic and the scan graphic, and extracting a sample non-overlapping pattern; encoding the sample non-overlapping pattern, to form sample coded data; using the sample coded data as input data of machine learning, to obtain a detection model library; and detecting a defect point of a to-be-detected device by using the detection model library. The present disclosure can improve the accuracy of defect point analysis, thereby accelerating the development of technology and improving the production efficiency.

Dependencies are inferred from the claim text.