Method and apparatus for inspection and metrology

A method comprising:

• receiving measurement data of a metrology target measured according to a metrology recipe;
• determining, by a hardware computer and at least partially based on a through-put model of an inspection apparatus, a sampling scheme for measuring data with the metrology target using the metrology recipe;
• determining an evaluation parameter based on the measurement data and the sampling scheme;
• determining that the evaluation parameter crosses a threshold;
• and
• changing, at least partially based on the through-put model, the sampling scheme responsive to the evaluation parameter crossing the threshold.