Reticle pod having positioning member
AssigneeGudeng Precision Industrial Co., Ltd.
InventorsCHIA-HO CHUANG, HSING-MIN WEN, YI-HSUAN LEE, HSIN-MIN HSUEH, MING-CHIEN CHIU
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AssigneeGudeng Precision Industrial Co., Ltd.
InventorsCHIA-HO CHUANG, HSING-MIN WEN, YI-HSUAN LEE, HSIN-MIN HSUEH, MING-CHIEN CHIU
Estimating the term…
A reticle pod having a positioning member includes a base, a lid and a plurality of positioning members. The lid shuts relative to the base to form a substantially cuboid case. The case has a storing space for receiving a reticle. The positioning members are arranged in a shutting direction and disposed on at least two edges of the lid or at least two edges of the base, respectively. The positioning members each include a connecting portion, a correcting portion and a guiding slope portion. The connecting portion connects the edges of the lid. The correcting portion has one end connected to the connecting portion and extending in a shutting direction and an opposing end connected to the guiding slope portion. The guiding slope portion has a slope extending outward. The reticle pod having a positioning member is error-free, allowing the lid to shut precisely relative to the base.
A reticle pod having a positioning member, comprising:
A reticle pod having a positioning member, comprising:
Dependencies are inferred from the claim text.