Chemically amplified positive -type photosensitive resin composition, photosensitive dry film, method of manufacturing photosensitive dry film, method of manufacturing patterned resist film, method of manufacturing substrate with template, and method of manufacturing plated article

A chemically amplified positive-type photosensitive resin composition for use in manufacturing a template for forming a plated article by embedding a metal by a plating treatment on a substrate having a metal surface, the chemically amplified positive-type photosensitive resin composition comprising:

• an acid generator (A) which generates acid upon exposure to an irradiated active ray or radiation, and a resin (B) whose solubility in alkali increases under an action of acid,
• wherein the acid generator (A) comprises at least one compound selected from:
• a compound represented by the following formula (a1-i) or (a1-ii):
• wherein in the formulae (a1-i) and (a1-ii),
• X1a is an oxygen atom or a sulfur atom;
• R1a is selected from the group consisting of an aliphatic group having 1 or more and 18 or less carbon atoms, optionally substituted with one or more halogen atoms;
• an aliphatic group having 2 or more and 18 or less carbon atoms, including at least one moiety selected from the group consisting of —S—, —C(═O)—S—, —O—S(═O)2—, —O—C(═O)—O—, —C(═O)—NH—, —C(═O)—NR10a—, and —C(═O)—NR10aR11a, and optionally substituted with one or more halogen atoms;
• a group represented by the following formula (a11):
• —R3a—Ar (a11)
• a group represented by the following formula (a12):
• and
• a group represented by the following formula (a13):
• wherein in the formula (a11), R3a is a single bond, or an aliphatic group having 1 or more and 20 or less carbon atoms, optionally including at least one moiety selected from the group consisting of —O—, —S—, —C(═O)—O—, —C(═O)—S—, —O—S(═O)2—, —O—C(═O)—O—, —C(═O)—NH—, —O—C(═O)—NH—, —C(═O)—NR10a—, and —C(═O)—NR10a—,
• Ar is an aromatic group which may have one or more substituents selected from the group consisting of a halogen atom, an aliphatic group, a haloalkyl group, an alkoxy group, a haloalkoxy group, an alkylthio group, a dialkylamino group, an acyloxy group, an acylthio group, an acylamino group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylsulfinyl group, an aryl group, an alkyl aryl group, a cyano group, and a nitro group,
• in the formula (a12), R4a and R5a are each independently an aliphatic group having 1 or more and 5 or less carbon atoms;
• Y1a is an oxygen atom;
• R6a is an aliphatic group having 1 or more and 10 or less carbon atoms, and
• R7a is an aliphatic group having 1 or more and 18 or less carbon atoms, including at least one moiety selected from the group consisting of —O—, —S—, —C(═O)—S—, —O—S(═O)2—, —O—C(═O)—O—, —C(═O)—NH—, —O—C(═O)—NH—, —C(═O)—NR10a—, —O—C(═O)—NR10a—, and —C(═O)—NR10aR11a,
• in the formula (a13), R8a is an aliphatic group having 2 or more and 18 or less carbon atoms, optionally including at least one moiety selected from the group consisting of —O—, —S—, —C(═O)—S—, —O—S(═O)2—, —O—C(═O)—O—, —C(═O)—NH—, —O—C(═O)—NH—, —C(═O)—NR10a—, and —O—C(═O)—NR10a—,
• Y2a is an oxygen atom;
• R9a is an aliphatic group having 1 or more and 18 or less carbon atoms, including at least one moiety selected from the group consisting of —O—, —S—, —C(═O)—O—, —C(═O)—S—, —O—S(═O)2—, —O—C(═O)—O—, —C(═O)—NH—, —O—C(═O)—NH—, —C(═O)—NR10a—, —O—C(═O)—NR10a—, and —C(═O)—NR10aR11a,
• R10a and R11a are each an aliphatic group having 1 or more and 10 or less carbon atoms, and in —C(═O)—NR10aR11a, R10a and R11a may be the same as or different from each other, and bonded to each other to form an alicyclic group, and
• R2a is selected from the group consisting of an aliphatic group having 1 or more and 18 or less carbon atoms, optionally substituted with one or more halogen atoms;
• an aliphatic group having 3 or more and 18 or less carbon atoms, including at least one moiety selected from the group consisting of —O—, —S—, —C(═O)—O—, —C(═O)—S—, —O—S(═O)2—, —O—C(═O)—O—, —C(═O)—NH—, —O—C(═O)—NH—, —C(═O)—NR10a—, —O—C(═O)—NR10a—, and —C(═O)—NR10aR11a, and optionally substituted with one or more halogen atoms;
• an aromatic group having 4 or more and 18 or less carbon atoms, which may have one or more substituents selected from the group consisting of a halogen atom, an aliphatic group, a haloalkyl group, an alkoxy group, a haloalkoxy group, an alkylthio group, a dialkylamino group, an acyloxy group, an acylthio group, an acylamino group, an alkoxy carbonyl group, an alkylsulfonyl group, an alkylsulfinyl group, an aryl group, an alkyl aryl group, a cyano group, and a nitro group;
• and
• an alkyl group substituted with an aromatic group having 4 or more and 18 or less carbon atoms, which may have one or more substituents selected from the group consisting of a halogen atom, an aliphatic group, a haloalkyl group, an alkoxy group, a haloalkoxy group, an alkylthio group, a dialkylamino group, an acyloxy group, an acylthio group, an acylamino group, an alkoxy carbonyl group, an alkylsulfonyl group, an alkylsulfinyl group, an aryl group, an alkyl aryl group, a cyano group, and a nitro group,
• a compound represented by the following formula (a2-i) or (a2-ii):
• wherein in the formulae (a2-i) to (a2-ii),
• R21a is a hydrogen atom;
• an aliphatic group having 1 or more and 18 or less carbon atoms, optionally substituted with one or more halogen atoms;
• or
• an aliphatic group having 2 or more and 18 or less carbon atoms, optionally including at least one moiety selected from the group consisting of —O—, —S—, —C(═O)—, —C(═O)—O—, —C(═O)—S—, —O—C(═O)—O—, —C(═O)—NH—, —O—C(═O)—NH—, —C(═O)—NR10a—, —O—C(═O)—NR10a—, and —C(═O)—NR10aR11a, and optionally substituted with one or more halogen atoms,
• R22a is selected from the group consisting of —CH3, —CH2F, —CHF2, —CF3, or an aliphatic group having 2 or more and 18 or less carbon atoms, optionally substituted with one or more halogen atoms;
• an aliphatic group having 2 or more and 18 or less carbon atoms, including at least one moiety selected from the group consisting of —O—, —S—, —C(═O)—, —C(═O)—O—, —C(═O)—S—, —O—C(═O)—O—, —C(═O)—NH—, —O—C(═O)—NH—, —C(═O)—NR10a—, —O—C(═O)—NR10a—, and —C(═O)—NR10aR11a, and optionally substituted with one or more halogen atoms;
• an aromatic group having 4 or more and 18 or less carbon atoms, which may have one or more substituents selected from the group consisting of a halogen atom, an aliphatic group, a haloalkyl group, an alkoxy group, a haloalkoxy group, an alkylthio group, a dialkylamino group, an acyloxy group, an acylthio group, an acylamino group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylsulfinyl group, an aryl group, an alkyl aryl group, a cyano group, and a nitro group;
• and
• an alkyl group substituted with an aromatic group having 4 or more and 18 or less carbon atoms, which may have one or more substituents selected from the group consisting of a halogen atom, an aliphatic group, a haloalkyl group, an alkoxy group, a haloalkoxy group, an alkylthio group, a dialkylamino group, an acyloxy group, an acylthio group, an acylamino group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylsulfinyl group, an aryl group, an alkyl aryl group, a cyano group, and a nitro group,
• wherein when R22a is —CF3, R21a is a group selected from the group consisting of a hydrogen atom;
• an aliphatic group having 2 or more and 18 or less carbon atoms, optionally including at least one moiety selected from the group consisting of —O—, —S—, —C(═O)—, —C(═O)—O—, —C(═O)—S—, —O—C(═O)—O—, —C(═O)—NH—, —O—C(═O)—NH—, —C(═O)—NR10a—, —O—C(═O)—NR10a—, and —C(═O)—NR10aR11a, and optionally substituted with one or more halogen atoms;
• —CH2CH(CH3)2, —CH2CH═CHCH3, or —CH2CH2CH═CH2;
• a group represented by the following formula (a21):
• —CH2—R23a (a21)
• and
• a group represented by the following formula (a22):
• R10a and R11a are each an aliphatic group having 1 or more and 10 or less carbon atoms, and in —C(═O)—NR10aR11a, R10a and R11a may be the same as or different from each other, and bonded to each other to form an alicyclic group,
• in the formula (a21), R23a is an aliphatic group having 4 or more and 18 or less carbon atoms,
• in the formula (a22), R24a is a hydrogen atom, or an alkyl group having 1 or more and 10 or less carbon atoms, and na is an integer of 1 to 5
• and
• a compound represented by the following formulae (a3-i) or (a3-ii):
• wherein in the formulae (a3-i) to (a3-ii), R31a and R32a are each independently a group selected from the group consisting of a hydrogen atom;
• a cyano group;
• an aliphatic group having 1 or more and 18 or less carbon atoms, optionally substituted with one or more halogen atoms;
• an aliphatic group having 1 or more and 18 or less carbon atoms, including at least one moiety selected from the group consisting of —O—, —S—, —C(═O)—, —C(═O)—O—, —C(═O)—S—, —OC(═O)—O—, —CN, —C(═O)—NH—, —C(═O)—NR10a—, and —C(═O)—NR10aR11a, and optionally substituted with one or more halogen atoms;
• and
• an aromatic group having 4 or more and 18 or less carbon atoms, which may have one or more substituents selected from the group consisting of a halogen atom, an aliphatic group, a haloalkyl group, an alkoxy group, a haloalkoxy group, an alkylthio group, a dialkylamino group, an acyloxy group, an acylthio group, an acylamino group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylsulfinyl group, an aryl group, an alkyl aryl group, a cyano group, and a nitro group;
• R31a and R32a may be the same as or different from each other, and bonded to each other to form an alicyclic group or a heterocyclic group, R33a is selected from the group consisting of an aliphatic group having 1 or more and 18 or less carbon atoms, optionally substituted with one or more halogen atoms;
• an aliphatic group having 1 or more and 18 or less carbon atoms, including at least one moiety selected from the group consisting of —O—, —S—, —C(═O)—, —C(═O)—O—, —C(═O)—S—, —O—C(═O)—O—, —CN, —C(═O)—NH—, —O—C(═O)—NH—, —C(═O)—NR10a—, —O—C(═O)—NR10a—, and —C(═O)—NR10aR11a, and optionally substituted with one or more halogen atoms;
• and
• an aromatic group having 4 or more and 18 or less carbon atoms, which may have one or more substituents selected from the group consisting of a halogen atom, an aliphatic group, a haloalkyl group, an alkoxy group, a haloalkoxy group, an alkylthio group, a dialkylamino group, an acyloxy group, an acylthio group, an acylamino group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylsulfinyl group, an aryl group, an alkyl aryl group, a cyano group, and a nitro group,
• R10a and R11a are each an aliphatic group having 1 or more and 10 or less carbon atoms, and in —C(═O)—NR10aR11a, R10a and R11a may be the same as or different from each other, and bonded to each other to form an alicyclic group,
• wherein the chemically amplified positive-type photosensitive resin composition comprises an acrylic resin that is a resin comprising an acrylic constituent unit that is a constituent unit derived from (meth)acrylic acid or (meth)acrylic acid derivative in a content of 70 mol % or more, and
• a ratio of the acrylic resin to a total of the resin (B) and a resin other than the resin (B) is 70% by mass or more.