Pellicle having vent hole
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChue San YOO, Chih-Chiang TU, Chien-Cheng CHEN, Jong-Yuh CHANG, Kun-Lung HSIEH, Pei-Cheng HSU, Hsin-Chang LEE, Yun-Yue LIN
Life of this patent
Estimating the term…
Abstract
A pellicle includes a frame configured to attach to a photomask, wherein the frame includes a vent hole. The pellicle further includes a filter covering the vent hole, wherein the filter directly connects to an outer surface of the frame. The pellicle further includes a membrane extending over a top surface of the frame. The pellicle further includes a mount between the frame and the membrane, wherein the mount is attachable to the frame by an adhesive.
Claims20
A pellicle comprising:
- a frame configured to attach to a photomask, wherein the frame comprises a vent hole;
- a filter covering the vent hole, wherein the filter directly connects to an outer surface of the frame;
- a membrane extending over a top surface of the frame;
- and
- a mount between the frame and the membrane, wherein the mount is attachable to the frame by an adhesive.
A pellicle comprising:
- a frame comprising a vent hole, wherein a first bottom surface of the frame is configured to attach to a photomask, and a second bottom surface of the frame is configured to remain spaced from the photomask;
- a filter covering the vent hole, wherein the filter directly connects to an outer surface of the frame;
- a membrane extending over a top surface of the frame;
- and
- a mount between the frame and the membrane, wherein the mount is attachable to the frame by an adhesive.
A pellicle comprising:
- a frame comprising a vent hole, wherein a width of the frame is constant in a direction perpendicular to the vent hole;
- a filter covering the vent hole, wherein the filter directly connects to an outer surface of the frame;
- a membrane extending over a top surface of the frame;
- and
- a mount between the frame and the membrane, wherein the mount is attachable to the frame by an adhesive.
Dependencies are inferred from the claim text.