Methods for forming patterned insulating layers on conductive layers and devices manufactured using such methods
AssigneeCorning Incorporated
InventorThomas Mikio Wynne
Life of this patent
Estimating the term…
Abstract
A method for forming a patterned insulating layer on a conductive layer can include removing an annular region of an insulating layer overlying a perimeter of an opening in a mask by laser ablation. The mask can be removed from the conductive layer to remove an excess portion of the insulating layer disposed on the mask, whereby a remaining portion of the insulating layer defines the patterned insulating layer disposed on the central region of the conductive layer, and a surrounding region of the conductive layer surrounding the central region of the conductive layer is uncovered by the patterned insulating layer.
Claims22
A method for forming a patterned insulating layer on a conductive layer, the method comprising:
- removing an annular region of an insulating layer overlying a perimeter of an opening in a mask by laser ablation, an inner portion of the annular region of the insulating layer disposed on a central region of the conductive layer corresponding to the opening in the mask, and an outer portion of the annular region of the insulating layer disposed on the mask, whereby an annular portion of the central region of the conductive layer is uncovered by each of the mask and the insulating layer;
- and
- removing the mask from the conductive layer to remove an excess portion of the insulating layer disposed on the mask, whereby a remaining portion of the insulating layer defines the patterned insulating layer disposed on the central region of the conductive layer, and a surrounding region of the conductive layer surrounding the central region of the conductive layer is uncovered by the patterned insulating layer.
A method for forming a patterned insulating layer on a conductive layer, the method comprising:
- applying a mask to the conductive layer disposed on a wafer comprising a plurality of wells;
- severing the mask along a perimeter of each of a plurality of central regions of the mask, each of the plurality of central regions overlying a corresponding one of the plurality of wells;
- removing each of the plurality of central regions of the mask to form a plurality of openings in the mask and uncover a plurality of central regions of the conductive layer each disposed at least partially in a corresponding one of the plurality of wells, whereby a remaining region of the mask surrounding the plurality of openings in the mask covers a corresponding surrounding region of the conductive layer disposed outside the plurality of wells;
- applying an insulating layer to each of the plurality of central regions of the conductive layer and the remaining region of the mask;
- removing a plurality of annular regions of the insulating layer each overlying the perimeter of a corresponding one of the plurality of openings in the mask by laser ablation, an inner portion of each of the plurality of annular regions of the insulating layer disposed on a corresponding one of the plurality of central regions of the conductive layer, and an outer portion of each of the plurality of annular regions of the insulating layer disposed on the mask, whereby an annular portion of each of the plurality of central regions of the conductive layer is uncovered by each of the mask and the insulating layer;
- and
- removing the remaining region of the mask from the conductive layer to remove an excess portion of the insulating layer disposed on the remaining region of the mask, whereby a remaining portion of the insulating layer defines the patterned insulating layer disposed at least partially within the plurality of wells, and the surrounding region of the conductive layer is uncovered by the patterned insulating layer.
20-22. (canceled)
An electrowetting device comprising:
- a first window, a second window, and a cavity disposed between the first window and the second window;
- a first liquid and a second liquid disposed within the cavity, the first liquid and the second liquid substantially immiscible with each other, whereby a liquid interface is formed between the first liquid and the second liquid;
- a driving electrode disposed on a sidewall of the cavity;
- and
- an insulating layer disposed within the cavity to insulate the driving electrode from the first liquid and the second liquid;
- wherein the insulating layer is substantially free of flaps and stringers .
24-29. (canceled)
Dependencies are inferred from the claim text.