Systems and methods for sensing rotation angles of a micro mirror in an optical sensing system
AssigneeBeijing Voyager Technology Co., Ltd.
InventorsYoumin Wang, Yufeng Wang, Gary Li
Life of this patent
Estimating the term…
Abstract
Embodiments of the disclosure provide systems and methods for reflecting optical signals in an optical sensing system. The micromachined mirror assembly includes a micro mirror and at least one actuator mechanically connected to the micro mirror through at least one connection, configured to drive the micro mirror to tilt for a rotation angle around an axis, causing an in-plane stress on the at least one connection. The micromachined mirror assembly also includes at least one piezoelectric sensor configured to detect the rotation angle of the micro mirror based on a signal indicative of the in-plane stress sensed at the at least one connection.
Claims20
A micromachined mirror assembly for reflecting optical signals in an optical sensing system, the micromachined mirror assembly comprising:
- a micro mirror;
- at least one actuator mechanically connected to the micro mirror through at least one connection, configured to drive the micro mirror to tilt for a rotation angle around an axis, causing an in-plane stress on the at least one connection;
- and
- at least one piezoelectric sensor configured to detect the rotation angle of the micro mirror based on a signal indicative of the in-plane stress sensed at the at least one connection.
A method for sensing rotation angles of a micro mirror, comprising:
- driving the micro mirror to tilt for a rotation angle around an axis using at least one actuator mechanically connected to the micro mirror through at least one connection, wherein the tilting of the micro mirror causes an in-plane stress on the at least one connection;
- sensing, using a piezoelectric sensor, a signal indicative of the in-plane stress at the at least one connection;
- and
- determining the rotation angle of the micro mirror based on the sensed signal.
An optical sensing system, comprising:
- a transmitter configured to emit optical signals in a plurality of directions;
- a receiver configured to detect reflected optical signals;
- and
- a micromachined mirror assembly comprising:
- a micro mirror;
- at least one actuator mechanically connected to the micro mirror through at least one connection, configured to drive the micro mirror to tilt for a rotation angle around an axis, causing an in-plane stress on the at least one connection;
- and
- at least one piezoelectric sensor configured to detect the rotation angle of the micro mirror based on a signal indicative of the in-plane stress sensed at the at least one connection.
Dependencies are inferred from the claim text.