Granular sensing on an integrated circuit

Abstract

An IC is provided. The IC includes a power grid including Mx layer interconnects extending in a first direction on an Mx layer and Mx+1 layer interconnects extending in a second direction orthogonal to the first direction on an Mx+1 layer, where x>5. In addition, the IC includes a plurality of power switches. Further, the IC includes at least one sensing element located between the Mx layer and the Mx+1 layer and configured to measure a voltage drop to devices powered by the plurality of power switches. The one or more of the plurality of power switches may be located below the power grid. The power switches of the plurality of power switches may be adjacent in the first direction and in the second direction to each sensing element of the at least one sensing element.

Dependencies are inferred from the claim text.