Analysis device and image generation method
AssigneeTokyo Electron Limited
InventorShin UCHIDA
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AssigneeTokyo Electron Limited
InventorShin UCHIDA
Estimating the term…
An analysis device analyzes inspection results of an inspection object which includes inspection target devices having respective electrodes on which needle marks are formed. The analysis device includes a display part for displaying an image, and an image generation part for generating an image to be displayed on the display part. The image generation part generates an analysis image based on information on inspection results with respect to the needle marks. The analysis image includes a needle mark scatter plot image showing positions of the needle marks with respect to the electrodes in each inspection target device in an overlapped manner, an inspection object map image showing a surface of the inspection object and showing needle mark inspection results with respect to the inspection target devices, and a captured image of the electrodes. Display contents of the images are linked with each other.
An analysis device for analyzing results of inspection of an inspection object, comprises:
An image generation method of generating an image used for analyzing results of inspection of an inspection object, the method comprises:
Dependencies are inferred from the claim text.