Reticle defect inspection method and system
AssigneeChangxin Memory Technologies, Inc.
InventorsLihua Hou, Wen-Hao Hsu
Life of this patent
Estimating the term…
Abstract
Provided are a reticle defect inspection method and system. The reticle defect inspection method includes: a reticle is provided; a reticle defect inspection system is provided, and when the reticle is placed on a station or leaves the station, defect inspection is continuously performed on the reticle to obtain defect information of each defect; a dynamic threshold of each defect is obtained from the defect information of each defect; and whether the dynamic threshold of each defect belongs to a threshold unacceptable by the inspection system is judged, and if so, warning processing is performed.
Claims18
A reticle defect inspection method, comprising:
- providing a reticle;
- providing a reticle defect inspection system, and in a case where the reticle is placed on a station or leaves the station, continuously performing defect inspection on the reticle to obtain defect information of each defect;
- obtaining a dynamic threshold of each defect from the defect information of each defect;
- and
- judging whether the dynamic threshold of each defect belongs to a threshold unacceptable by the inspection system, and if so, performing warning processing.
A reticle defect inspection system, comprising:
- an obtaining module, configured to, in a case where a reticle is placed on a station or leaves the station, continuously perform defect inspection on the reticle to obtain defect information of each defect;
- a data processing module, electrically connected with the obtaining module and configured to obtain a dynamic threshold of each defect from the defect information of each defect;
- and
- a warning module, electrically connected with the data processing module and configured to judge whether the dynamic threshold of each defect belongs to a threshold unacceptable by the inspection system, and to perform warning processing in response to judging that the dynamic threshold of the defect belongs to the threshold unacceptable by the inspection system.
Dependencies are inferred from the claim text.