Package structure for differential pressure sensor, and electronic device
AssigneeMemsensing Microsystems (Suzhou, China) Co., Ltd.
InventorsGang LI, Jiaxin MEI, Chenglong SHAO
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AssigneeMemsensing Microsystems (Suzhou, China) Co., Ltd.
InventorsGang LI, Jiaxin MEI, Chenglong SHAO
Estimating the term…
A package structure for a differential pressure sensor, and an electronic device are provided. The package structure includes: a substrate and a housing, an edge of the housing is fixed to a front side of the substrate and defines a first chamber with the substrate; and a pressure sensing element fixed to the front side of the substrate and disposed in the first chamber, the pressure sensing element is provided with a second chamber and a pressure sensing layer, the pressure sensing layer being disposed between the first chamber and the second chamber. The first chamber is connected with the outside via a first through hole, and the second chamber is connected with the outside via a second through hole.
A package structure for a differential pressure sensor, comprising:
An electronic device, comprising:
Dependencies are inferred from the claim text.