Gyroscope structure
AssigneeSensortek Technology Corp.
InventorsSHIH-HSIUNG TSENG, SHIH-WEI LEE, CHAO-SHIUN WANG
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AssigneeSensortek Technology Corp.
InventorsSHIH-HSIUNG TSENG, SHIH-WEI LEE, CHAO-SHIUN WANG
Estimating the term…
The present invention provides a gyroscope structure. A frame disposed on a substrate, and a flexible element is correspondingly disposed a first, second, and third plate. The first plate has a second flexibility. The second plate is connected to the second plate, the second plate is connected to the third plate with a fourth flexible element, the second plate is provided with a first through-hole, and a rotating plate is pivotally connected in the first through-hole. The rotating plate is connected to a supporting column of the substrate by a fifth flexible part, and then a sensing element is provided on the substrate corresponding to the first, second, and third plates to sense the movement and movement of the plates. Rotating, in one embodiment, the first and third plates are provided with through-holes, and corresponding sensing elements and driving elements are provided.
A gyroscope structure, features comprising:
Dependencies are inferred from the claim text.