Measuring device and method for determining the course of a bonding wave
AssigneeEV Group E. Thallner GmbH
InventorsDominik ZINNER, Jürgen MALLINGER, Thomas PLACH, Boris POVAZAY, Harald ROHRINGER, Jürgen Markus SÜSS
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Abstract
The invention relates to a measuring device for determining a course of a bonding wave in a gap (3) between a first substrate (2) and a second substrate (4). Furthermore, the present invention relates to a corresponding method.
Claims19
A measuring device for determining a course of a bonding wave in a gap between a first substrate and a second substrate, said measuring device comprising:
- at least one transmitter located at a peripheral edge of the gap for transmitting signals in the form of electromagnetic waves along a signal path running through the gap;
- and
- at least one receiver, located at the peripheral edge of the gap for receiving the signals of the signal path which are sent by the at least one transmitter through the gap and which can change before bonding of the first and second substrates and/or during bonding of the first and second substrates.
A method for determining a course of a bonding wave in a gap between a first substrate and a second substrate by means of a measuring device including at least one transmitter and at least one receiver, said method comprising:
- arranging the at least one transmitter at a peripheral edge of the gap,
- arranging the at least one receiver at the peripheral edge of the gap,
- transmitting signals in the form of electromagnetic waves by means of the at least one transmitter arranged at the peripheral edge along a first signal path running through the gap,
- receiving the signals by means of the at least one receiver or receivers arranged at the peripheral edge for the reception of the signals of the signal path which are sent by the at least one transmitter through the gap and which can change before bonding of the first and second substrates and/or during bonding of the first and second substrates.
Dependencies are inferred from the claim text.