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US 2022/0025528 A1Published application
Method and apparatus for energy efficient electrochemical production of hydride gases
AssigneeAyers Group, LLC
InventorWilliam M. Ayers
Life of this patent
Estimating the term…
Abstract
Described are electrochemical systems and methods for the generation of high purity hydride gases, e.g. for delivery to semiconductor fabrication reactors.
Claims31
An electrochemical apparatus for generation of hydride gas, comprising:
- an electrochemical reactor having a pressure vessel having an interior containing a cathode, an anode, and an electrolyte, wherein the cathode includes a first amount of an electrically conductive precursor material that is reducible to form the hydride gas;
- a first cathode material refill chamber having an interior containing a second amount of the electrically conductive precursor material and having a first opening communicating with the interior of the pressure vessel for transfer of some or all of the second amount of the electrically conductive precursor material to the interior of the pressure vessel;
- a valve selectively positionable to an open position allowing transfer of some or all of the second amount of the electrically conductive precursor material through the first opening and into the interior of the pressure vessel and a closed position providing a gas tight seal between the interior of the pressure vessel and the interior of the cathode material refill chamber.
An electrochemical apparatus for generation of hydride gas, comprising:
- an electrochemical reactor having a pressure vessel having an interior containing a cathode, an anode, and an electrolyte, wherein the cathode includes a first amount of an electrically conductive precursor material that is reducible to form the hydride gas;
- wherein the conductive precursor material is in particulate form, and wherein the cathode includes a packed bed of particles of the conductive precursor material;
- and
- wherein (i) a bottom of the packed bed is spaced from and faces a top surface of the anode and/or (ii) the packed bed and anode are arranged such that at least 80% (preferably at least 90% and more preferably at least 95%) by weight of the particles of the packed bed can be consumed during generation of the hydride gas by the apparatus without changing the electrochemical reaction cross-section area of the reactor.
1 more element
(canceled)
18-20. (canceled)
(canceled)
26-30. (canceled)
32-51. (canceled)
A method for generating a hydride gas, comprising:
- operating an electrochemical reactor having a pressure vessel having an interior containing a cathode, an anode, and an electrolyte, wherein the cathode includes an electrically conductive precursor material that is reducible to form the hydride gas, said operating causing electrochemical reduction of the electrically conductive precursor material to form hydride gas and thereby consumption of amounts of the electrically conductive precursor material;
- transferring replenishing amounts of the electrically conductive precursor material from an interior of a first cathode material refill chamber into the interior of the pressure vessel, said transferring including transitioning a valve from a closed position providing a gas tight seal between the interior of the pressure vessel and the interior of the cathode material refill chamber to an open position allowing transfer of the replenishing amounts of the electrically conductive precursor material through a first opening of the first cathode material refill chamber and into the interior of the pressure vessel.
A method for generating a hydride gas, comprising:
- providing an electrochemical reactor having a pressure vessel having an interior containing a cathode, an anode, and an electrolyte, wherein the cathode includes a first amount of an electrically conductive precursor material that is reducible to form the hydride gas, wherein the conductive precursor material is in particulate form, wherein the cathode includes a packed bed of particles of the conductive precursor material, and wherein (i) a bottom of the packed bed is spaced from and faces a top surface of the anode and/or (ii) the packed bed and anode are arranged such that at least 80% (preferably at least 90% and more preferably at least 95%) by weight of the particles of the packed bed can be consumed during generation of the hydride gas by the apparatus without changing the electrochemical reaction cross-section area of the reactor;
- and
- conducting electrical current between the cathode and the anode, said conducting causing electrochemical reduction of the electrically conductive precursor material to form the hydride gas and thereby consumption of amounts of the electrically conductive precursor material.
54-113. (canceled)
An electrochemical apparatus for generation of hydride gas, comprising:
- an electrochemical reactor having a pressure vessel having an interior containing a cathode, an anode, and an electrolyte, wherein the cathode includes a first amount of an electrically conductive precursor material that is reducible to form the hydride gas;
- and
- a gas tight filter external of and fluidly connected to the pressure vessel, the apparatus being operable to circulate the electrolyte through the filter to purify the electrolyte of electrochemical by-products.
115-117. (canceled)
Dependencies are inferred from the claim text.