Coating of nano-scaled cavities
AssigneeAveratek Corporation
InventorsSunity K. SHARMA, Shinichi IKETANI
Life of this patent
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Abstract
Methods, systems, and apparatus for coating the internal surface of nano-scale cavities on a substrate are contemplated. A first fluid of high wettability is applied to the nano-scale cavity, filling the cavity. A second fluid carrying a conductor or a catalyst is applied over the opening of the nano-scale cavity. The second fluid has a lower vapor pressure than the first fluid. The first fluid is converted to a gas, for example by heating the substrate. The gas exits the nano-scale cavity, creating a negative pressure or vacuum in the nano-scale cavity. The negative pressure draws the second fluid into the nano-scale cavity. The conductor is deposited on the interior surface of the nano-scale cavity, preferably less than 10 nm thick.
Claims21
A method of depositing a material on an interior surface of a cavity in a substrate, the method comprising:
- filling the cavity at least partially with a first fluid;
- covering the cavity having the first fluid with a second fluid comprising a material source, wherein the first fluid has a higher vapor pressure than the second fluid;
- vaporizing the first fluid into a gas, and permitting the gas to exit the cavity, thus creating a negative pressure in the cavity;
- drawing the second fluid into the cavity by way of the negative pressure;
- and
- depositing the material from the material source onto the interior surface of the cavity.
Dependencies are inferred from the claim text.