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US 2022/0025518 A1Published application
Doped amorphous optical device films and deposition via incorporation of dopant atoms
AssigneeApplied Materials, Inc.
InventorsAndrew CEBALLOS, Ludovic GODET, Karl J. ARMSTRONG, Rami HOURANI
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Abstract
Embodiments of the present disclosure generally relate to methods and materials for optical device fabrication. More specifically, embodiments described herein provide for optical film deposition methods and materials to expand the process window for amorphous optical film deposition via incorporation of dopant atoms by suppressing the crystal growth of optical materials during deposition. By enabling amorphous films to be deposited at higher temperatures, significant cost savings and increased throughput are possible.
Claims20
A method, comprising:
- disposing an optical device substrate on a substrate support, the substrate support disposed in a chamber, the chamber comprising:
- an optical device material target disposed in the chamber, the optical device material target comprising an optical device material;
- and
- a dielectric target disposed in the chamber, the dielectric target comprising a dopant material;
- and
- depositing a doped optical device film on the optical device substrate, comprising:
- depositing the optical device material to form an optical device layer on a surface of the optical device substrate, the depositing the optical device material comprising providing a first power level to the optical device material target to deposit the optical device material at a first deposition rate;
- and
- depositing the dopant material into the optical device layer to form the doped optical device film, the depositing the dopant material comprising providing a second power level to the dielectric target to deposit the dopant material at a second deposition rate, wherein the first deposition rate and the second deposition rate are different.
6 more elements
A method, comprising:
- disposing an optical device substrate in a chamber, the chamber comprising one or more targets each having a pre-doped optical device material, the pre-doped optical device material comprising:
- an optical device material at a first concentration;
- and
- a dopant material at a second concentration;
- and
- providing power to the target to deposit a doped optical device film on the optical device substrate.
3 more elements
A method, comprising:
- disposing an optical device substrate in a chamber;
- flowing an optical device material precursor into the chamber at a first flow rate to deposit an optical device layer on a surface of the optical device substrate;
- and
- flowing a dopant precursor into the chamber at a second flow rate to form a doped optical device film on the optical device substrate.
1 more element
A method, comprising:
- disposing an optical device substrate on a substrate support, the substrate support disposed in a chamber, the chamber comprising:
- an optical device material target disposed in the chamber, the optical device material target comprising an optical device material;
- and
- a dielectric target disposed in the chamber, the dielectric target comprising a dopant material;
- depositing a doped optical device film on the optical device substrate, comprising:
- depositing the optical device material to form an optical device layer on a surface of the optical device substrate, the depositing the optical device material comprising providing a first power level to the optical device material target and providing an oxygen-containing gas to the chamber to deposit the optical device layer at a first deposition rate;
- and
- depositing the dopant material into the optical device layer to form the doped optical device film, the depositing the dopant material comprising providing a second power level to the dielectric target to deposit the dopant material at a second deposition rate, wherein the first deposition rate and the second deposition rate are different.
5 more elements
An optical device, comprising:
- a doped optical device film disposed over a surface of an optical device substrate, the doped optical device film comprising:
- an amorphous optical device material;
- and
- a dopant material, wherein the dopant material is incorporated into the amorphous optical device material.
1 more element
Dependencies are inferred from the claim text.