Fluid contact process, coated article, and coating process
AssigneeSilcotek Corp.
InventorMin YUAN
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AssigneeSilcotek Corp.
InventorMin YUAN
Estimating the term…
Fluid contact process, coated article, and coating processes are disclosed. The fluid contact process includes flowing a corrosive fluid to contact a coated article. The coated article includes an aluminum-containing substrate, a first region on the aluminum-containing substrate, the first region comprising carbon and silicon, a second region distal from the aluminum-containing substrate in comparison to the first region, the second region having oxygen at a greater concentration, by weight, than the first region, a third region distal from the first region in comparison to the second region, the third region comprising amorphous silicon. The coating process includes positioning the aluminum-containing substrate within an enclosed chamber, then, thermally decomposing dimethyl silane-and-silane-containing mixture within the enclosed chamber, then thermally oxidizing, and then, thermally decomposing silane.
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A coated article, comprising:
A coated article, comprising:
A coated article, comprising:
Dependencies are inferred from the claim text.