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US 2022/0025138 A1Published application
Laminate For Patterned Substrates
AssigneeLG Chem, Ltd.
InventorsMi Sook Lee, Se Jin Ku, No Jin Park, Jung Keun Kim, Je Gwon Lee, Hyung Ju Ryu, Eun Young Choi
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Abstract
The present application relates to a block copolymer and a use thereof. The present application can provide a laminate which is capable of forming a highly aligned block copolymer on a substrate and thus can be effectively applied to production of various patterned substrates, and a method for producing a patterned substrate using the same.
Claims13
A method for producing a patterned substrate comprising:
- coating a coating liquid on a polymer stripe pattern of a substrate, wherein the coating liquid comprises a block copolymer, which comprises a polymer segment A satisfying one or more of Conditions 1 to 3 below, and a polymer segment B different from the polymer segment A and having an absolute value of a difference between a surface energy of the polymer segment A and a surface energy of the polymer segment B of 10 mN/m or less, and
- forming a self-assembled structure of the block copolymer,
- wherein the polymer stripe pattern is formed on the surface of the substrate, and the polymer stripe pattern comprises a polymer, which satisfies one or more of Conditions 1 to 3 below, or has an absolute value of a difference between a surface energy of the polymer and the surface energy of the polymer segment A of 10 mN/m or less and a number average molecular weight of 8 Kg/mol to 100 Kg/mol,
- Condition 1:
- it exhibits a melting transition peak or an isotropic transition peak in a range of −80° C. to 200° C. in a differential scanning calorimetry (DSC) analysis,
- Condition 2:
- it exhibits a peak having a half-value width in a range of 0.2 to 0.9 nm−1 within a scattering vector (q) range of 0.5 nm−1 to 10 nm−1 in an X-ray diffraction (XRD) analysis,
- Condition 3:
- it comprises a side chain, which satisfies Equation 1 below:
- 3 nm−1 to 5 nm−1=nq/(2×π) [Equation 1]
- wherein, n is a number of the chain-forming atoms and q is the smallest scattering vector in which a peak is observed or the scattering vector in which a peak of the largest peak area is observed in the XRD analysis.
8 more elements
Dependencies are inferred from the claim text.