Elastic parylene
AssigneeSpecialty Coating Systems, Inc.
InventorsAndreas Greiner, Tobias Moss, Rakesh Kumar
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Abstract
Elastic Parylene films produced via chemical vapor deposition polymerization (CVDP) on a substrate are disclosed.
Claims42
A chemically cross-linked elastic Parylene or poly(para-xylylene) (PPX) polymer film.
The Parylene polymer film of any of the preceding claims, wherein a vinyl content of the polymer film is about 5% or less.
The Parylene polymer film of any of the preceding claims, wherein a vinyl content of the polymer film is about 2.5% or less, e.g. within a range of about 0.5% to about 1.25%, e.g. about 1%.
The Parylene polymer film of any of the preceding claims, wherein the polymer film has a Young's modulus of between about 0.01 GPa and about 0.05 GPa.
The Parylene polymer film of any of the preceding claims, wherein the polymer film has a Young's modulus of between about 0.02 GPa and about 0.04 GPa.
The Parylene polymer film of any of the preceding claims, wherein the polymer film has an enhanced solvent resistance, e.g. an enhanced organic solvent resistance.
The Parylene polymer film of any of the preceding claims, wherein the polymer film has thermal dimensional stability up to about 350° C.
The Parylene polymer film of any of the preceding claims, wherein the polymer film has an elongation at break value of up to about 100%, 150%, 200%, 300%, or 350%.
The Parylene polymer film of any of the preceding claims, wherein the polymer film has a cyclic strain test value of at least about 100% elongation per cycle.
The Parylene polymer film of any of the preceding claims, wherein the polymer film has a cyclic strain test shape shift value of between about 20% and 30%.
The Parylene polymer film of any of the preceding claims, wherein the polymer film is substantially insoluble.
The Parylene polymer film of any of the preceding claims, wherein the polymer film has a low glass transition temperature.
The Parylene polymer film of any of the preceding claims, comprising a substituted paracyclophane and a vinyl-functionalized paracyclophane copolymerized on a substrate.
The Parylene polymer film of any of the preceding claims, wherein the substituted paracyclophane is a dialkyl functionalized paracyclophane, e.g. a dibutyl functionalized paracyclophane.
The Parylene polymer film of any of the preceding claims, wherein the substituted paracyclophane is 4,12-dibutyl[2,2]paracyclophane.
The Parylene polymer film of any of the preceding claims, wherein the vinyl-functionalized paracyclophane is 4-vinyl[2.2]paracyclophane.
The Parylene polymer film of any of the preceding claims, wherein the polymer film is treated with UV, plasma, e-beam cross-linking, or temperature, e.g. annealed.
The Parylene polymer film of any of the preceding claims, wherein the polymer film has a thickness of greater than about 0.5 μm.
A method of preparing a chemically cross-linked elastic Parylene or poly(para-xylylene) (PPX) polymer film, comprising:
- mixing a substituted paracyclophane and a vinyl-functionalized paracyclophane to form a mixture;
- and
- co-polymerizing the mixture via a chemical vapor deposition polymerization (CVDP) process on a substrate to form the chemically cross-linked elastic polymer film.
The method of any of the preceding claims, wherein the substituted paracyclophane has a low glass transition temperature.
The method of any of the preceding claims, wherein the substituted paracyclophane is a dialkyl functionalized paracyclophane, e.g. a dibutyl functionalized paracyclophane.
The method of any of the preceding claims, wherein the substituted paracyclophane is 4,12-dibutyl[2,2]paracyclophane.
The method of any of the preceding claims, wherein the vinyl-functionalized paracyclophane is 4-vinyl[2.2]paracyclophane.
The method of any of the preceding claims, wherein the ratio of the vinyl-paracyclophane to the substituted paracyclophane is between about 1:500 and 1:10, preferably between about 1:200 and 1:100.
The method of any of the preceding claims, wherein the chemically cross-linked elastic polymer film has a vinyl content of about 5% or less.
The method of any of the preceding claims, wherein the chemically cross-linked elastic polymer film has a vinyl content of about 2.5% or less.
The method of any of the preceding claims, wherein the chemically cross-linked elastic polymer film has a vinyl content of about 0.5% to about 1.25%, e.g. about 1%.
The method of any of the preceding claims, wherein the CVDP process involves a pyrolysis temperature of about 500° C.
The method of any of the preceding claims, wherein the CVDP process involves a transport temperature of about 300° C.
The method of any of the preceding claims, wherein the CVDP process involves a deposition temperature of about 10° C.
The method of any of the preceding claims, wherein the CVDP process involves a sublimation temperature of about 125° C.
The method of any of the preceding claims, further comprising synthesizing the vinyl-functionalized paracyclophane.
The method of any of the preceding claims, further comprising subjecting the chemically cross-linked elastic polymer film to further thermal treatment, UV illumination, plasma conditioning, or e-beam cross-linking.
The method of any of the preceding claims, wherein further thermal treatment involves application of an annealing temperature of about 100° C. to about 350° C., e.g. about 300° C. for a duration of about 1 minute to about 30 minutes, e.g. about 5 minutes.
The method of any of the preceding claims, wherein the substrate is a flexible substrate.
The method of any of the preceding claims, wherein the flexible substrate pertains to a printed circuit board (PCB) or a medical device.
A chemically cross-linked elastic Parylene or poly(para-xylylene) (PPX) polymer film prepared by any of the preceding methods.
A device, comprising:
- a flexible substrate coated with the Parylene polymer film of any of the preceding claims.
The device of any of the preceding claims, wherein the flexible substrate pertains to a printed circuit board (PCB).
The device of any of the preceding claims, wherein the flexible substrate pertains to a medical device, e.g. an implantable device.
The device of any of the preceding claims, wherein the medical device comprises a heart valve, stent, defibrillator, or pacemaker.
The device of any of the preceding claims, wherein the medical device comprises an artificial joint, disc, screw, or other orthopedic implement.
Dependencies are inferred from the claim text.