Micro-electromechanical system device and method of forming the same
AssigneeVanguard International Semiconductor Corporation
InventorJia Jie Xia
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Abstract
The present disclosure related to a micro-electromechanical system (MEMS) device and a method of forming the same. The MEMS device includes a substrate, a cavity, an interconnection structure and a proof mass. The substrate includes a first surface and a second surface opposite to the first surface. The cavity is disposed in the substrate to extend between the first surface and the second surface. The interconnection structure is disposed on the first surface of the substrate, over the cavity. The proof mass is disposed on the interconnection structure, wherein the proof mass is partially suspended over the interconnection structure.
Claims20
A micro-electromechanical system device comprising:
- a substrate, comprising a first surface and a second surface opposite to the first surface;
- a cavity disposed in the substrate, extending between the first surface and the second surface;
- an interconnection structure disposed on the first surface of the substrate, over the cavity;
- and
- a proof mass disposed on the interconnection structure, wherein the proof mass is partially suspended over the interconnection structure.
A method of fabricating micro-electromechanical system device comprising:
- providing a substrate, the substrate comprising a first surface and a second surface opposite to the first surface;
- forming a cavity in the substrate, the cavity extending between the first surface and the second surface;
- forming an interconnection structure on the first surface of the substrate, over the cavity;
- and
- forming a proof mass on the interconnection structure, wherein the proof mass is partially suspended over the interconnection structure.
Dependencies are inferred from the claim text.