Protective member forming apparatus
AssigneeDisco Corporation
InventorYoshinori KAKINUMA
Life of this patent
Estimating the term…
Abstract
A protective member forming apparatus includes an ultraviolet radiation applying table that supports a workpiece on a support surface of a support plate thereof through which ultraviolet rays are transmittable, a delivery unit that holds a resin sheet to which the workpiece is fixed, to unload the workpiece from the ultraviolet radiation applying table, a resin supply unit that supplies an ultraviolet-curable liquid resin to the resin sheet placed on the support surface, a pressing unit that presses the workpiece from a reverse side thereof toward the liquid resin supplied to the resin sheet placed on the support surface, and an ionizer unit that ejects ionized air to the support surface of the ultraviolet radiation applying table.
Claims2
A protective member forming apparatus that forms a protective member on a surface of a plate-shaped workpiece, the protective member forming apparatus comprising:
- an ultraviolet radiation applying table that supports the workpiece on a support surface of a support plate of the ultraviolet radiation applying table, the support plate being configured such that ultraviolet rays from an ultraviolet radiation source disposed in the ultraviolet radiation applying table are transmittable through the support plate;
- a sheet placement unit that places, on the support surface, a sheet that is larger than the workpiece and through which the ultraviolet rays are transmittable;
- a resin supply unit that supplies an ultraviolet-curable liquid resin to the sheet placed on the support surface;
- a pressing unit that presses the workpiece from another surface of the workpiece toward the liquid resin supplied to the sheet placed on the support surface;
- an unloading unit that holds the sheet to which the workpiece is fixed with the liquid resin cured by the ultraviolet rays being interposed between the sheet and the workpiece, and unloads the workpiece from the ultraviolet radiation applying table;
- and
- an ionizer unit that ejects ionized air to the support surface of the ultraviolet radiation applying table,
- wherein, when the sheet is spaced from the support surface by the unloading unit, the ionized air ejected from the ionizer unit is introduced along the support surface into a gap between the sheet and the support surface.
Dependencies are inferred from the claim text.