Laser apparatus and method for manufacturing display device
AssigneesSamsung Display Co., Ltd., Philoptics Co., Ltd.
InventorsSung Ho NOH, Jae Yoon JEONG, Jun Ho SIM, Jae Ku HAN
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Abstract
A laser apparatus and a method for manufacturing a display device are provided. A laser apparatus includes: a stage; a laser providing unit above the stage and configured to provide a laser beam; a scanner configured to adjust an optical path of the laser beam such that the laser beam is irradiated to an irradiation line formed above the stage; and a control unit to control an operation of the scanner, and the scanner includes a shutter located on an optical path of the laser beam emitted from the laser providing unit and configured to perform an opening/closing operation.
Claims20
A laser apparatus comprising:
- a stage;
- a laser providing unit above the stage and configured to provide a laser beam;
- a scanner configured to adjust an optical path of the laser beam such that the laser beam is irradiated to an irradiation line formed above the stage;
- and
- a control unit to control an operation of the scanner,
- wherein the scanner includes a shutter located on an optical path of the laser beam emitted from the laser providing unit and configured to perform an opening/closing operation.
A laser apparatus comprising:
- a laser providing unit configured to emit a laser beam during a first period and a second period;
- an optical path adjustment unit configured to adjust an angle at which the laser beam travels;
- and
- a shutter located on a traveling path of the laser beam,
- wherein the shutter is opened during the first period to allow the emitted laser beam to travel, and is closed during the second period to block travel of the emitted laser beam.
A method for manufacturing a display device, the method comprising:
- irradiating a laser beam along a cutting line on a target substrate according to an irradiation pattern,
- wherein the irradiating of the laser beam onto the target substrate according to the irradiation pattern comprises, when a position of a target aiming point of the laser beam is located in a processing area, opening a shutter if a moving speed of the target aiming point of the laser beam is higher than or equal to a reference speed, and closing the shutter if the moving speed of the target aiming point of the laser beam is lower than the reference speed.
Dependencies are inferred from the claim text.