Nanopore forming method and analysis method
AssigneeHitachi, Ltd.
InventorItaru Yanagi
Life of this patent
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Abstract
Provided is a technique for stably forming a single nanopore by dielectric breakdown for a membrane having a high dielectric breakdown withstand voltage. In the nanopore forming method of the present disclosure, a SiNx film is placed between the first aqueous solution and the second aqueous solution, the first electrode is brought into contact with the first aqueous solution, and the second electrode is brought into contact with the second aqueous solution, and a voltage is applied to the first electrode and the second electrode. The SiNx film has a composition ratio of 1<x<4/3. At least any one of the first aqueous solution and the second aqueous solution has the pH of 10 or more.
Claims15
A nanopore forming method, comprising:
- arranging a SiNx film between a first aqueous solution and a second aqueous solution;
- bringing a first electrode to come into contact with the first aqueous solution and bringing a second electrode to come into contact with the second aqueous solution;
- and
- applying a voltage to the first electrode and the second electrode,
- wherein the SiNx film has a composition ratio of 1<x<4/3, and
- at least any one of the first aqueous solution and the second aqueous solution has a pH of 10 or more.
An analysis method of an object to be measured using a nanopore, comprising:
- arranging a SiNx film between a first aqueous solution and a second aqueous solution;
- bringing a first electrode to come into contact with the first aqueous solution and bringing a second electrode to come into contact with the second aqueous solution;
- making the first aqueous solution or the second aqueous solution to contain the object to be measured;
- forming the nanopore in the SiNx film by applying a voltage to the first electrode and the second electrode;
- and
- analyzing the object to be measured by measuring a current value between the first electrode and the second electrode when the object to be measured passes through the nanopore,
- wherein the SiNx film has a composition ratio of 1<x<4/3, and
- at least any one of the first aqueous solution and the second aqueous solution has a pH of 10 or more.
An analysis method of an object to be measured using a nanopore, comprising:
- arranging a SiNx film between a first aqueous solution and a second aqueous solution;
- bringing a first electrode to come into contact with the first aqueous solution and bringing a second electrode to come into contact with the second aqueous solution;
- forming the nanopore in the SiNx film by applying a voltage to the first electrode and the second electrode;
- replacing at least one of the first aqueous solution and the second aqueous solution after forming the nanopore into an aqueous solution containing the object to be measured;
- and
- analyzing the object to be measured by measuring a current value between the first electrode and the second electrode when the object to be measured passes through the nanopore,
- wherein the SiNx film has a composition ratio of 1<x<4/3, and
- at least any one of the first aqueous solution and the second aqueous solution has a pH of 10 or more.
A nanopore forming method, comprising:
- arranging a film between a first aqueous solution and a second aqueous solution;
- bringing a first electrode to come into contact with the first aqueous solution and bringing a second electrode to come into contact with the second aqueous solution;
- applying a voltage to the first electrode and the second electrode:
- and
- stopping an application of the voltage when a current flowing between the first electrode and the second electrode reaches a predetermined threshold current,
- wherein the film has a property that a single nanopore is not formed when a pH of the first aqueous solution and a pH of the second aqueous solution are 7 or more and 8 or less, and
- at least any one of the first aqueous solution and the second aqueous solution has a pH of 10 or more when the nanopore is formed.
Dependencies are inferred from the claim text.