Workpiece inspection device and workpiece inspection method

A workpiece inspection device configured to capture an image of a surface of a workpiece by an image capturing unit and determine quality of the workpiece, the workpiece inspection device comprising:

• a table on which the workpiece is placed;
• an image capturing unit fixing part configured to fix the image capturing unit disposed at a position spaced apart from the workpiece;
• a first light projection unit;
• a second light projection unit;
• a linear movement mechanism configured to linearly move the table or the image capturing unit fixing part to freely adjust a relative distance between the table and the image capturing unit fixing part;
• a turning mechanism that has a rotation axis extending in a direction perpendicular to a moving direction of the linear movement mechanism, configured to freely turn the image capturing unit with respect to the image capturing unit fixing part around the rotation axis;
• a quality determination unit configured to determine the quality of the workpiece based on the image captured by the image capturing unit;
• and
• a control unit configured to control the linear movement mechanism and the turning mechanism,
• wherein the control unit performs:
• a first image capturing step of causing the first light projection unit to project light onto the workpiece and causing the image capturing unit to capture an image;
• a detailed inspection portion-determination step of setting, as a detailed inspection-requiring portion, in a case where there is a portion of the workpiece determined to require a detailed inspection based on the image captured in the first image capturing step;
• a second image capturing step of causing the second light projection unit to project light onto the workpiece and causing the image capturing unit to capture an image of the detailed inspection-requiring portion in a case where the detailed inspection-requiring portion is set in the detailed inspection portion-determination step;
• and
• a quality determination step of determining the quality of the detailed inspection-requiring portion based on the image captured in the second image capturing step.