On-substrate mechanical stress sensing and compensation

A system, comprising:

• a piezoelectric material having a crystal axis, a first piezo-resistive coefficient having a first-axis orientation that is oriented with respect to the crystal axis, and a second piezo-resistive coefficient having a second-axis orientation that is different from the first-axis orientation;
• a precision component formed on the piezoelectric material in a first location, wherein the precision component includes a performance parameter that is affected by a stress exerted in the piezoelectric material;
• a first stress sensor formed on the piezoelectric material in a second location, the first stress sensor coupled to the precision component;
• a second stress sensor formed on the piezoelectric material in a third location, the second stress sensor coupled to the precision component;
• and
• a processor coupled to the precision component, the first stress sensor, the second stress sensor, and arranged to generate a compensation quantity in response to an output of the first stress sensor and an output of the second stress sensor, and in response to the first location, the second location, and the third location, wherein the compensation quantity is applied to the precision component to compensate an output signal of the precision component that is affected by the performance parameter.

A method, comprising:

• arranging a precision component on a piezoelectric material, wherein the piezoelectric material has a crystal axis, a first piezo-resistive coefficient having a first-axis orientation that is oriented with respect to the crystal axis, and a second piezo-resistive coefficient that is transverse to the crystal axis, wherein the precision component includes a performance parameter that is affected by a stress exerted in the piezoelectric material;
• arranging a first-axis stress sensor on the piezoelectric material and electrically coupled to the precision component, wherein the first-axis stress sensor includes a first-axis stress sensing resistor coupled in series with a second-axis stress sensing resistor, the first-axis stress sensing resistor including first-axis conductors arranged along the crystal axis, and the second-axis stress sensing resistor including second-axis conductors arranged transverse to the crystal axis, wherein a ratio of a resistance of the first-axis stress sensing resistor to the second-axis stress sensing resistor is directly proportional to the ratio of the first piezo-resistive coefficient to the second piezo-resistive coefficient;
• generating, by the first-axis stress sensor, a first-axis sensing signal in response to a first-axis resultant of the stress exerted in the piezoelectric material;
• and
• generating, by a compensating circuit, an analog compensating signal in response to an analog signal received from a to-be-compensated circuit and the first-axis sensing signal.