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AssigneesSunPower Corporation, Total Marketing Services
InventorsTaiqing Qiu, Gilles Olav Tanguy Sylvain Poulain, Périne Jaffrennou, Nada Habka, Sergej Filonovich
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Described herein are methods of fabricating solar cells. In an example, a method of fabricating a solar cell includes forming an amorphous dielectric layer on the back surface of a substrate opposite a light-receiving surface of the substrate. The method also includes forming a microcrystalline silicon layer on the amorphous dielectric layer by plasma enhanced chemical vapor deposition (PECVD). The method also includes forming an amorphous silicon layer on the microcrystalline silicon layer by PECVD. The method also includes annealing the microcrystalline silicon layer and the amorphous silicon layer to form a homogeneous polycrystalline silicon layer from the microcrystalline silicon layer and the amorphous silicon layer. The method also includes forming an emitter region from the homogeneous polycrystalline silicon layer.
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A back contact solar cell, comprising:
A back contact solar cell, comprising:
Dependencies are inferred from the claim text.