Methods of Incorporating Leaker Devices into Capacitor Configurations to Reduce Cell Disturb, and Capacitor Configurations Incorporating Leaker Devices
AssigneeMicron Technology, Inc.
InventorsMarcello Mariani, Giorgio Servalli
Life of this patent
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Abstract
Some embodiments include an integrated assembly having a row of conductive posts. The conductive posts are spaced from one another by gaps. Leaker device material extends is within at least some of the gaps. An insulative material is along sidewalls of the conductive posts. A conductive structure is over the conductive posts. The conductive structure has downward projections extending into at least some of the gaps. The leaker device material is configured as segments along sides of the downward projections and extends from the sides to one or more of the conductive posts. Some embodiments include methods of forming integrated assemblies.
Claims40
An integrated assembly, comprising:
- a row of vertically-extending conductive posts;
- the conductive posts being spaced from one another by gaps;
- leaker device material being within at least some of the gaps;
- an insulative material along sidewalls of the conductive posts;
- and
- a conductive structure over the conductive posts;
- the conductive structure having downward projections extending into at least some of the gaps;
- the leaker device material being configured as horizontally-extending segments along sides of the downward projections and extending from said sides to one or more of the conductive posts.
An integrated assembly, comprising:
- a row of conductive posts;
- the conductive posts being spaced from one another by gaps;
- the gaps alternating between first gaps and second gaps;
- the first gaps having leaker device material extending between neighboring posts and the second gaps not having the leaker device material therein;
- an insulative material along sidewalls of the conductive posts;
- and
- a conductive structure over the conductive posts and having first and second downward projections extending into the first and second gaps, respectively;
- the first downward projections extending through the leaker device material and being directly against the leaker device material;
- the second downward projections extending further than the first downward projections to be deeper than the first downward projections.
A method of forming an integrated assembly, comprising:
- forming conductive posts over access devices;
- the conductive posts being spaced from one another by gaps;
- leaker device material being within the gaps and contacting sidewalls of the posts;
- removing segments of the leaker device material to form a configuration having a row of the posts along a cross-section;
- the row having the gaps between the posts with the gaps alternating between first gaps and second gaps;
- the first gaps having the leaker device material therein, and the second gaps not having the leaker device material therein;
- the second gaps being deeper than the first gaps due to at least the leaker device material within the first gaps;
- forming insulative-capacitor-material within the first and second gaps and along the sidewalls of the posts;
- the insulative-capacitor-material lining the first and second gaps and extending along bottom peripheries of the first gaps;
- forming first conductive material over the posts and within the first and second gaps;
- the first conductive material being over the insulative-capacitor-material;
- forming openings to extend through the first conductive material and the insulative-capacitor-material along the bottom peripheries of the first gaps, the openings penetrating through the leaker device material;
- and
- filling the openings with second conductive material;
- the first and second conductive materials together forming a conductive structure;
- the second conductive material within the openings being configured as downward projections of the conductive structure;
- the leaker device material extending from the downward projections of the conductive structure to neighboring conductive posts and directly contacting the conductive structure and the neighboring conductive posts;
- the conductive structure, insulative-capacitor-material and conductive posts together forming a plurality of capacitors.
Dependencies are inferred from the claim text.