Semiconductor structure and method of manufacturing same
AssigneeChangxin Memory Technologies, Inc.
InventorsZhongming LIU, Jia FANG
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AssigneeChangxin Memory Technologies, Inc.
InventorsZhongming LIU, Jia FANG
Estimating the term…
The present application relates to a semiconductor structure and a method of manufacturing the same. The method includes: providing a substrate; forming a bitline contact hole located in the substrate, and a non-metal conductive layer with which a surface of the substrate is covered and the bitline contact hole is filled, the non-metal conductive layer provided with a first opening therein, the first opening aligned with the bitline contact hole; forming a metal conductive layer, with which a surface of the non-metal conductive layer is covered; forming an insulation layer, with which a surface of the metal conductive layer surface is covered; and etching the insulation layer, the metal conductive layer, and the non-metal conductive layer to form a bitline structure.
A method of manufacturing a semiconductor structure, comprising:
A semiconductor structure, comprising:
Dependencies are inferred from the claim text.