Layout designs of integrated circuits having backside routing tracks
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsWei-An LAI, Shih-Wei PENG, Wei-Cheng LIN, Jiann-Tyng TZENG
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsWei-An LAI, Shih-Wei PENG, Wei-Cheng LIN, Jiann-Tyng TZENG
Estimating the term…
An integrated circuit includes a semiconductor substrate, transistors on the semiconductor, horizontal routing tracks extending in a first direction in a first metal layer, and one or more backside routing tracks extending in the first direction in a backside metal layer. Each transistor has a gate terminal, a source terminal, and a drain terminal. A first transistor has a first terminal, a second terminal, and a third terminal. A first horizontal routing track of the horizontal routing tracks is conductively connected to the first terminal of the first transistor through a via connector. A first backside routing track is conductively connected to the second terminal of the first transistor through a backside via connector. The backside metal layer and the first metal layer are formed at opposite sides of the semiconductor substrate.
An integrated circuit comprising:
An integrated circuit comprising:
A method of fabricating an integrated circuit, the method comprising:
Dependencies are inferred from the claim text.