Nanoscale resolution, spatially-controlled conductivity modulation of dielectric materials using a focused ion beam
AssigneeNorthwestern University
InventorsHooman Mohseni, Simone Bianconi
Life of this patent
Estimating the term…
Abstract
Methods for creating a conductive feature in a dielectric material are provided. In an embodiment, such a method comprises irradiating a region of a dielectric material having a resistivity of at least 108 W cm with a focused ion beam, the irradiated region corresponding to a conductive feature embedded in the dielectric material, the conductive feature having a conductivity greater than that of the dielectric material; and forming one or more contact pads of a conductive material in electrical communication with the conductive feature, the one or more contact pads configured to apply a voltage across the conductive feature using a voltage source.
Claims20
A method for creating a conductive feature in a dielectric material, the method comprising:
- irradiating a region of a dielectric material having a resistivity of at least 108 Ωcm with a focused ion beam, the irradiated region corresponding to a conductive feature embedded in the dielectric material, the conductive feature having a conductivity greater than that of the dielectric material;
- and
- forming one or more contact pads of a conductive material in electrical communication with the conductive feature, the one or more contact pads configured to apply a voltage across the conductive feature using a voltage source.
A device comprising a modified dielectric material, the device comprising:
- a dielectric material having a resistivity of at least 108 Ωcm and a conductive feature embedded in the dielectric material, the conductive feature composed of the dielectric material, but having a conductivity greater than that of the dielectric material;
- and
- one or more contact pads of a conductive material, the one or more contact pads in electrical communication with the conductive feature and configured to apply a voltage across the conductive feature using a voltage source.
Dependencies are inferred from the claim text.