Method of manufacturing semiconductor device

Abstract

A method of manufacturing a semiconductor device, including preparing a semiconductor wafer having a first main surface and a second main surface opposite to each other, forming a first electrode on the first main surface of the semiconductor wafer, applying a first tape to the second main surface of the semiconductor wafer, so as to cover the second main surface of the semiconductor wafer with the first tape, applying a second tape to an outer peripheral portion of the semiconductor wafer, to thereby cover an end of the semiconductor wafer with the second tape, heating the semiconductor wafer having the first tape and the second tape applied thereto, by a heat treatment at a temperature of at least 40 degrees C., and forming a plating layer on a surface of the first electrode after heating the semiconductor wafer.

Dependencies are inferred from the claim text.