Substrate transferring device and method of operating the same

A substrate transferring device configured to transfer a substrate from a container in which a plurality of substrates are accommodated, while holding the substrate, comprising:

• a hand configured to hold the substrate;
• a manipulator;
• and
• a controlling device,
• wherein the hand is provided at a tip-end part with a substrate detector having a first light-emitting part configured to emit light toward a principal surface of the substrate, and a first light-receiving part configured to receive the light reflected on the principal surface of the substrate, and
• wherein the controlling device causes the first light-emitting part of the substrate detector to emit the light toward the principal surface of the substrate while the controlling device operates the manipulator to enter the hand into the container, and determines an occurrence of a positional deviation of the substrate based on whether the first light-receiving part of the substrate detector receives the light reflected on the principal surface of the substrate.

A method of operating a substrate transferring device including:

• a hand configured to hold a substrate;
• a manipulator to which the hand is attached;
• and
• a first substrate detector provided to the hand and configured to detect a distance to a principal surface of the substrate,
• the method comprising the steps of:
• (A) preparing the substrate placed on a placing stand;
• (B) detecting the distance to the principal surface of the substrate placed on the placing stand;
• and
• (C) holding the substrate by the hand.

A method of operating a substrate transferring device configured to transfer a substrate from a container in which a plurality of substrates are accommodated, while holding the substrate,

• wherein the substrate transferring device includes:
• a hand configured to hold the substrate;
• a manipulator;
• and
• a controlling device,
• the method comprising the steps of:
• providing, at a tip-end part of the hand, a substrate detector having a first light-emitting part configured to emit light toward a principal surface of the substrate, and a first light-receiving part configured to receive the light reflected on the principal surface of the substrate;
• and
• configuring the controlling device to cause the first light-emitting part of the substrate detector to emit the light toward the principal surface of the substrate while the manipulator being operated to enter the hand into the container, and determine an occurrence of a positional deviation of the substrate based on whether the first light-receiving part of the substrate detector receives the light reflected on the principal surface of the substrate.