Control device, system and control method

A system comprising:

• a film forming apparatus including a processing chamber configured to execute a film forming processing on a substrate based on a processing recipe;
• a controller configured to perform an optimization calculation of the processing recipe;
• and
• a measuring meter configured to measure a film characteristic of a film formed on the substrate on which the film forming processing has been executed,
• wherein the film forming apparatus, the controller, and the measuring meter are connected to each other via a network, and
• the controller includes:
• reception circuitry configured to receive the film characteristic at a plurality of positions of the film formed on the substrate by the film forming processing based on the processing recipe;
• optimization processing circuitry configured to execute the optimization calculation of the processing recipe based on the film characteristic;
• diagnosis circuitry configured to diagnose a validity of an in-plane shape of the film characteristic based on the film characteristic;
• and
• determination circuitry configured to determine whether or not to notify a user of an encouraging action based on a diagnosis result by the diagnosis circuitry.

A control method comprising:

• receiving a film characteristic at a plurality of positions of a film formed on a substrate by a film forming processing based on a processing recipe;
• executing an optimization calculation of the processing recipe based on the film characteristic;
• diagnosing a validity of an in-plane shape of the film characteristic based on the film characteristic;
• and
• determining whether or not to notify a user of an encouraging action based on a diagnosis result in the diagnosing.