System and method for supplying chemical solution
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Chiang Tseng, Ming-Lee Lee, Chiang Jen Chen
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Abstract
A system includes a chemical storage tank, a pipeline, a pump, a first electrostatic probe, and a control unit. The pipeline is connected to the chemical storage tank. The pump is connected to the pipeline and configured to pump a chemical solution from the chemical storage tank into the pipeline. The first electrostatic probe is coupled to the pump and configured to measure an electrostatic voltage of the pump. The control unit is coupled to the first electrostatic probe and configured to obtain a measurement of an electrostatic voltage from the first electrostatic probe.
Claims20
A system for supplying chemical solutions, comprising:
- a chemical storage tank;
- a pipeline connected to the chemical storage tank;
- a pump connected to the pipeline and configured to pump a chemical solution from the chemical storage tank into the pipeline:
- a first electrostatic probe coupled to the pump and configured to measure an electrostatic voltage of the pump;
- and
- a control unit coupled to the first electrostatic probe and configured to obtain the measurement of the electrostatic voltage from the first electrostatic probe.
A method for supplying chemical solutions, comprising:
- providing a first electrostatic probe to a chemical supply system, wherein the chemical supply system comprises a chemical storage tank, a pipeline, a pump connected to the chemical storage tank and the pipeline, a first electrostatic probe coupled to the pump, and a control unit coupled to the first electrostatic probe;
- pumping a chemical solution from the chemical storage tank into the pipeline by the pump;
- providing a measurement of an electrostatic voltage of the pump by the first electrostatic probe to the control unit during the pumping of the chemical solution;
- and
- adjusting a parameter of the pump by the control unit according to the measurement of the electrostatic voltage of the pump.
A method of supplying a chemical solution, comprising:
- providing a chemical supply system coupled to a processing tool, wherein the chemical supply system comprises a pipeline, a pump connected to the pipeline, and a control unit;
- providing a first electrostatic probe to the pump;
- providing a chemical solution to the processing tool via the pipeline by the pump;
- providing a measurement of an electrostatic voltage of the pump by the first electrostatic probe to the control unit during the providing of the chemical solution to the processing tool;
- and
- adjusting a parameter of the pump by the control unit according to the measurement of the electrostatic voltage of the pump.
Dependencies are inferred from the claim text.