Protective component forming apparatus
AssigneeDisco Corporation
InventorsYoshinori KAKINUMA, Yoshikuni MIGIYAMA, Makoto SAITO
Life of this patent
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Abstract
A protective component forming apparatus includes a chuck table, a resin supply unit having a pump and a pipe that supply a liquid resin from a tank to a resin sheet held by the chuck table, a pressing unit that presses a workpiece against the liquid resin supplied to the resin sheet held by the chuck table, a curing unit that irradiates the liquid resin pressed by the pressing unit with ultraviolet and cures the liquid resin, a resin inspecting part that senses the viscosity of the liquid resin, and an informing unit.
Claims1
A protective component forming apparatus that forms a layer of a resin with a desired thickness on one surface of a plate-shaped workpiece, the protective component forming apparatus comprising:
- a chuck table that holds the workpiece with interposition of a sheet;
- a tank that stores a liquid resin cured by an external stimulus;
- a resin supply unit having a pump and a pipe that supply the liquid resin from the tank to the sheet held by the chuck table;
- a pressing unit that causes the one surface of the workpiece to face the liquid resin supplied to one surface of the sheet held by the chuck table and presses the workpiece;
- a curing unit that gives the external stimulus to the liquid resin pressed by the pressing unit and cures the liquid resin;
- a resin inspecting part that senses change in viscosity of the liquid resin in association with change in quality of the liquid resin;
- and
- an informing unit that transmits information to an operator, wherein
- the resin inspecting part measures a flow rate of the liquid resin that flows in the pipe by the pump or a load applied to the pressing unit that presses the liquid resin, and
- when a measurement value is outside an allowable range set in advance, the resin inspecting part informs that the measurement value is outside the allowable range by the informing unit.
Dependencies are inferred from the claim text.