Plasma processing apparatus and plasma processing method

A plasma processing apparatus comprising:

• a processing container;
• a stage provided within the processing container;
• an upper electrode provided above the stage, to interpose a space within the processing container;
• an inlet configured to introduce high-frequency waves that are VHF waves or UHF waves, the inlet being provided at an end of the space in a lateral direction and extending in a circumferential direction around a central axis of the processing container;
• and
• a waveguide device configured to supply the high-frequency waves to the inlet,
• wherein the waveguide device includes a resonator that provides a waveguide, and
• the waveguide of the resonator extends in the circumferential direction around the central axis and extends in a direction in which the central axis extends to be connected to the inlet.

A plasma processing method for performing plasma processing on a substrate using a processing apparatus, the plasma processing method comprising:

• supplying a gas to a space within a processing container of the plasma processing apparatus;
• and
• introducing high-frequency waves into the space in order to perform plasma processing on the substrate placed on a stage within the processing container,
• wherein the plasma processing apparatus comprises:
• the processing container;
• the stage provided within the processing container;
• an upper electrode provided above the stage, to interpose the space within the processing container;
• an inlet configured to introduce the high-frequency waves that are VHF waves or UHF waves, the inlet being provided at an end of the space in a lateral direction and extending in a circumferential direction around a central axis of the processing container;
• and
• a waveguide device configured to supply the high-frequency waves to the inlet,
• wherein the waveguide device includes a resonator that provides a waveguide, and
• the waveguide of the resonator extends in the circumferential direction around the central axis and extends in a direction in which the central axis extends to be connected to the inlet.