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AssigneeApplied Materials, Inc.
InventorsChien-Min LIAO, Yao-Hung YANG, Tom K. CHO, Siamak SALIMIAN, Hsiu YANG, Chun-Chung CHEN
Estimating the term…
Certain embodiments provide a method and non-transitory computer readable medium comprising instructions that, when executed by a processor of a processing system, cause the processing system to perform a method for improving operation of a semiconductor processing system. The method of part life estimation generally includes obtaining a chamber part having a first surface portion and second surface portion. A data matrix in the first portion of the chamber part is read. The data matrix has raised features. The first portion of the chamber part is cleaned. Wear on the raised features is evaluated. The part is discarded in response to the wear on the raised feature.
A method of part life estimation, comprising:
A non-transitory computer-readable medium comprising instructions that, when executed by a processor of a processing system, cause the processing system to perform a method for improving operation of semiconductor processing system, the method comprising:
A chamber part for a semiconductor processing chamber, the chamber part comprising:
Dependencies are inferred from the claim text.