Gas nozzle, manufacturing method of gas nozzle, and plasma treatment device
AssigneeKYOCERA Corporation
InventorsYukio NOGUCHI, Tomoya SAHASHI
Life of this patent
Estimating the term…
Abstract
A gas nozzle according to the present disclosure includes a supply hole having a tubular shape and configured to guide a gas and an injection hole connecting to the supply hole. The gas nozzle configured to inject the gas from the injection hole is made from ceramics or single crystal including an oxide, a fluoride, or an oxyfluoride of a rare earth element or an yttrium aluminum composite oxide as a primary component. An arithmetic mean roughness Ra of an inner circumferential surface forming the supply hole is smaller on an outflow side than on an inflow side of the gas.
Claims10
A gas nozzle, comprising:
- a supply hole having a tubular shape and configured to guide a gas;
- and
- an injection hole connecting to the supply hole,
- wherein the gas nozzle configured to inject the gas from the injection hole is made from ceramics or single crystal including an oxide, a fluoride, or an oxyfluoride of a rare earth element or an yttrium aluminum composite oxide as a primary component, and
- an arithmetic mean roughness Ra of an inner circumferential surface forming the supply hole is smaller on an outflow side than on an inflow side of the gas.
A manufacturing method of a gas nozzle, comprising:
- pressing and molding granules including an oxide, a fluoride, or an oxyfluoride of a rare earth element or an yttrium aluminum composite oxide as a primary component to obtain a compact;
- machining the compact to obtain a precursor formed with a pilot hole for a supply hole and a pilot hole for an injection hole;
- firing the precursor to obtain a sintered body;
- and
- polishing at least an inner circumferential surface of the sintered body forming the supply hole by an abrasive flow polishing method.
A manufacturing method of a gas nozzle, comprising:
- pressing and molding granules including an oxide, a fluoride, or an oxyfluoride of a rare earth element or an yttrium aluminum composite oxide as a primary component to obtain a compact;
- forming a pilot hole for a supply hole and a pilot hole for an injection hole in the compact by using a first cutting tool comprising a first shank provided with a spiral groove, and subsequently machining at least an inner circumferential surface forming a pilot hole for a supply hole by using a second cutting tool comprising a second shank mounted with a disc-shaped tip on an end side of the second shank to obtain a precursor, the disc-shaped tip having a diameter greater than a diameter of the second shank;
- and
- firing the precursor to obtain a sintered body.
A manufacturing method of a gas nozzle, comprising:
- growing a single crystal ingot having a columnar shape and including an oxide, a fluoride, or an oxyfluoride of a rare earth element or an yttrium aluminum composite oxide as a primary component;
- performing honing processing, rotary ultrasonic processing, or grinding processing on the single crystal ingot to form a supply hole and an injection hole;
- and
- polishing at least an inner circumferential surface of the single crystal ingot forming the supply hole by using an abrasive flow polishing method.
Dependencies are inferred from the claim text.